Microelectromechanical systems (MEMS)

Microelectromechanical systems (MEMS) are extremely small devices that include mechanical components (e.g., levers, mirrors, and springs) and electronic components (e.g., resistors, inductors, and capacitors). All MEMS have mechanical parts, but not all MEMS have moving parts. In general, larger MEMS are a few millimeters in size, and the smallest MEMS can be less than one micron in size. These devices are meant to make observations and report their findings. They will also execute specific functions if signaled to do so. For example, a MEMS sensor can identify the temperature in a room. If the temperature rises above a certain level, the MEMS sensor could signal the air conditioner to cool the room.

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MEMS technology can be used in many places and for many applications. Some everyday objects that use MEMS are smartphones, airbags, cameras, and medical equipment. The microsensors and microprocessors on MEMS convert physical energy into electrical energy. This allows them to influence the environment directly around them. MEMS are produced through microfabrication. These intricate pieces of equipment often are manufactured by etching or adding layers to silicon wafers. MEMS also can be manufactured from silicon dioxide, gold, titanium, and platinum.

History and Future of MEMS

In the 1950s, computer technology and electronics were beginning to develop. Even at this early stage, people dreamed of making electronic components and other devices extremely small. From the 1960s to the 1990s, the foundations for MEMS technology were laid out. Then, in the 2000s, MEMS technology started to be used in objects such as gaming systems, airbag systems, and smartphones. These extremely small processors made the objects in which they were used much more accurate. MEMS also allowed these objects to have new functions that were not available or were impractical with macrofabricated products. For example, MEMS gyroscopes made motion sensing in smartphones a possibility. By the 2010s, MEMS were replacing macrofabricated products in many different devices, including cameras and microphones.

In the future, MEMS will most likely continue to become smaller and will be used in more objects. One important application for MEMS in the future is the ability to connect to the Internet of things (IoT). The IoT refers to that many of the objects people use every day that are connected to the Internet and to one another. MEMS would allow more objects to have the electronic components they need to connect to the IoT. MEMS are also important in smartphones and wearable devices, and they will likely continue to be used in these products and help these products evolve into even smaller, more efficient devices.

How MEMS Are Used

MEMS can be produced to do countless jobs. MEMS can include accelerometers, gyroscopes, actuators, oscillators, clocks, pressure sensors, microphones, and more. Because so many types of MEMS exist, they are included in many devices and used in various fields. These are some applications for which MEMS are used:

  • MEMS are used as sensors in airbag systems. These systems tell the airbag when to deploy. They are even more sensitive and accurate than macrofabricated sensors traditionally used in airbag systems.
  • MEMS are used in heating and cooling systems. The MEMS are extremely sensitive to the temperature changes and allow the system to more accurately track and change the temperature. The precision of the MEMS technology saves energy and money.
  • MEMS can be used in airplane wings. The MEMS sensors track the air flow over the plane's wings. The MEMS can use their mechanical systems to change the surface of the plane's wings, thereby changing the wings' resistance.
  • MEMS can be used in global positioning system (GPS) devices. The accuracy of the MEMS sensors helps make the GPS devices even more accurate.
  • MEMS are used in space exploration equipment. MEMS are made from silicon, and they can be produced to withstand high radiation environments. Because they are resistant to wear in even difficult conditions, MEMS can help improve exploration equipment.
  • MEMS are used in medical equipment to make the devices more accurate and smaller. For example, MEMS sensors can be used in an implant that monitors a patient's blood pressure.

MEMS also are used in various other applications. They can be used in smartphones, gaming systems, and computers. They can be used in cameras and microphones. As MEMS technology continues to evolve, these systems will likely be used in even more ways and in many other products.

Why MEMS Are Used

MEMS are popular and will most likely become even more popular in the future for a number of reasons. One reason why MEMS are so popular is because they are accurate. For example, a MEMS pressure sensor in a blood pressure cuff is likely to be more accurate than a traditional sensor, making the blood pressure reading from the device more accurate. Furthermore, small parts and microfabrication make MEMS less likely to malfunction and break down than similar macrofabricated products.

Another reason why MEMS are popular is that they can often be produced inexpensively. MEMS are often produced on silicon wafers. Silicon is abundant and relatively inexpensive. Additionally, MEMS require a very small amount of material, so even when more expensive materials, such as gold, are used, only a small amount of the material is required. Although the microfabricating process is intricate, it also requires fewer materials, which reduces the cost of the final product.

Finally, MEMS are more efficient than many other macrofabricated systems. The tiny parts of MEMS allow them to use less energy. Also, they can send signals to other elements in their environment and perform functions more quickly than macrofabricated systems can.

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